High-Q HF microelectromechanical filters
نویسندگان
چکیده
منابع مشابه
Microelectromechanical Filters for Signal Processing
Microelectromechanical filters based on coupled lateral microresonators are demonstrated. This new class of microelectromechanical systems (MEMS) has potential signalprocessing applications for filters which require narrow bandwidth (high Q), good signal-to-noise ratio, and stable temperature and aging characteristics. Microfilters presented in this paper are made by surface-micromachining tech...
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ژورنال
عنوان ژورنال: IEEE Journal of Solid-State Circuits
سال: 2000
ISSN: 0018-9200,1558-173X
DOI: 10.1109/4.839911